Invention Grant
US09362885B2 Piezoelectric device 有权
压电元件

Piezoelectric device
Abstract:
A piezoelectric device includes a piezoelectric vibrating piece, a lid portion, and a base portion. The piezoelectric vibrating piece includes: a vibrating portion; a framing portion surrounding the vibrating portion; an excitation electrode in the vibrating portion; and an extraction electrode electrically connected to the excitation electrode in the framing portion. The lid portion is bonded to a front surface of the piezoelectric vibrating piece via a bonding material. The base portion includes an external electrode bonded to a back surface of the piezoelectric vibrating piece via a bonding material and electrically connected to the extraction electrode. The excitation electrode and the extraction electrode each include: a foundation film formed of metal to be rendered passive; and a first metal film and a second metal film laminated to the foundation film. The foundation film has a film thickness of 1.0 nm to 8.0 nm.
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