Invention Grant
- Patent Title: Piezoelectric device
- Patent Title (中): 压电元件
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Application No.: US14069378Application Date: 2013-11-01
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Publication No.: US09362885B2Publication Date: 2016-06-07
- Inventor: Takumi Ariji , Hiromasa Nakatake , Takehiro Takahashi
- Applicant: NIHON DEMPA KOGYO CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: NIHON DEMPA KOGYO CO., LTD.
- Current Assignee: NIHON DEMPA KOGYO CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Jianq Chyun IP Office
- Priority: JP2012-253341 20121119
- Main IPC: H01L41/047
- IPC: H01L41/047 ; H01L41/053 ; H03H9/13 ; H03H9/05 ; H03H9/10 ; H03H9/17

Abstract:
A piezoelectric device includes a piezoelectric vibrating piece, a lid portion, and a base portion. The piezoelectric vibrating piece includes: a vibrating portion; a framing portion surrounding the vibrating portion; an excitation electrode in the vibrating portion; and an extraction electrode electrically connected to the excitation electrode in the framing portion. The lid portion is bonded to a front surface of the piezoelectric vibrating piece via a bonding material. The base portion includes an external electrode bonded to a back surface of the piezoelectric vibrating piece via a bonding material and electrically connected to the extraction electrode. The excitation electrode and the extraction electrode each include: a foundation film formed of metal to be rendered passive; and a first metal film and a second metal film laminated to the foundation film. The foundation film has a film thickness of 1.0 nm to 8.0 nm.
Public/Granted literature
- US20140139073A1 PIEZOELECTRIC DEVICE Public/Granted day:2014-05-22
Information query
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