Invention Grant
US09363853B2 System and method for powering dual magnetrons using a dual power supply
有权
使用双电源为双磁控管供电的系统和方法
- Patent Title: System and method for powering dual magnetrons using a dual power supply
- Patent Title (中): 使用双电源为双磁控管供电的系统和方法
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Application No.: US13954480Application Date: 2013-07-30
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Publication No.: US09363853B2Publication Date: 2016-06-07
- Inventor: Mahmood Gharagozloo , Ta Hai Yeh , Pradyumna Kumar Swain
- Applicant: Heraeus Noblelight Fusion UV Inc.
- Applicant Address: US MD Gaithersburg
- Assignee: Heraeus Noblelight America LLC
- Current Assignee: Heraeus Noblelight America LLC
- Current Assignee Address: US MD Gaithersburg
- Agency: Lowenstein Sandler LLP
- Main IPC: H05B6/68
- IPC: H05B6/68
Abstract:
A system and method for powering a dual magnetron with a dual power supply is disclosed. A first power supply supplies a first voltage to a first magnetron. A second power supply supplies a second voltage to a second magnetron. A balancer circuit controls a drive current for altering a magnetic field of the first magnetron and a magnetic field of the second magnetron to maintain the first voltage and the second voltage at a substantially equal voltage.
Public/Granted literature
- US20140263291A1 SYSTEM AND METHOD FOR POWERING DUAL MAGNETRONS USING A DUAL POWER SUPPLY Public/Granted day:2014-09-18
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