Invention Grant
US09364862B2 Ultrasonic sensor microarray and method of manufacturing same 有权
超声波传感器微阵列及其制造方法

  • Patent Title: Ultrasonic sensor microarray and method of manufacturing same
  • Patent Title (中): 超声波传感器微阵列及其制造方法
  • Application No.: US14437616
    Application Date: 2013-11-01
  • Publication No.: US09364862B2
    Publication Date: 2016-06-14
  • Inventor: Sazzadur Chowdhury
  • Applicant: UNIVERSITY OF WINDSOR
  • Applicant Address: CA Windsor
  • Assignee: UNIVERSITY OF WINDSOR
  • Current Assignee: UNIVERSITY OF WINDSOR
  • Current Assignee Address: CA Windsor
  • International Application: PCT/CA2013/000937 WO 20131101
  • International Announcement: WO2014/066991 WO 20140508
  • Main IPC: B06B1/02
  • IPC: B06B1/02
Ultrasonic sensor microarray and method of manufacturing same
Abstract:
A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The microarray modules are arranged to simulate or orient individual transducers in a hyperbolic paraboloid geometry. The transducers/sensor are arranged in a rectangular or square matrix and are activatable individually, selectively or collectively to emit and received reflected beam signals at a frequency of between about 100 to 170 kHz.
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