Invention Grant
- Patent Title: Pressure sensor package with integrated sealing
- Patent Title (中): 压力传感器封装,集成密封
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Application No.: US14039706Application Date: 2013-09-27
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Publication No.: US09366593B2Publication Date: 2016-06-14
- Inventor: Mathias Vaupel , Horst Theuss , Helmut Wietschorke
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Murphy, Bilak & Hommiller, PLLC
- Main IPC: G01L9/00
- IPC: G01L9/00 ; B81B7/00 ; B81C1/00 ; G01L19/00

Abstract:
A pressure sensor package includes a lead and a semiconductor die spaced apart from the lead and including a terminal and a diaphragm disposed at a first side of the die. The die is configured to change an electrical parameter responsive to a pressure difference across the diaphragm. The package further includes an electrical conductor connecting the terminal to the lead, a molding compound encasing the electrical conductor, the die and part of the lead, a cavity in the molding compound exposing the diaphragm, and a sealing ring disposed on a side of the molding compound with the cavity. The sealing ring surrounds the cavity and has a lower elastic modulus than the molding compound. Alternatively, the sealing ring can be a ridge of the molding compound that protrudes from the side of the molding compound with the cavity and surrounds the cavity. A package manufacturing method is also provided.
Public/Granted literature
- US20150090042A1 Pressure Sensor Package with Integrated Sealing Public/Granted day:2015-04-02
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