Invention Grant
US09367882B2 Waferstart processes and systems for integrated circuit fabrication
有权
Waferstart用于集成电路制造的工艺和系统
- Patent Title: Waferstart processes and systems for integrated circuit fabrication
- Patent Title (中): Waferstart用于集成电路制造的工艺和系统
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Application No.: US13568449Application Date: 2012-08-07
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Publication No.: US09367882B2Publication Date: 2016-06-14
- Inventor: Tony Genenncher , Stephan Puelm , Michael Foerster , Juergen Sieberg
- Applicant: Tony Genenncher , Stephan Puelm , Michael Foerster , Juergen Sieberg
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: G06F19/00
- IPC: G06F19/00 ; B65H1/00 ; B65G1/00 ; G08B13/14 ; B08B3/00 ; B08B7/00 ; G06Q50/04 ; G06Q50/28 ; G06Q10/08 ; H01L21/67 ; H01L21/677

Abstract:
A waferstart process for integrated circuit fabrication includes entering order information from requested wafers into a computer through a data input interface of the computer. A container is provided including supplied wafers and having a machine-readable medium associated therewith. The machine-readable medium is encoded with wafer data pertaining to the supplied wafers. The wafer data is entered from the machine-readable medium associated with the container into the computer. The order information and the wafer data are compared within the computer to create a verified data set in the computer upon the computer determining that the supplied wafers in the container correspond to the requested wafers in the order information. The verified data set is stored in a storage medium within the computer. The supplied wafers are transferred from the container to a front opening unified pod after creating the verified data set.
Public/Granted literature
- US09251542B2 Waferstart processes and systems for integrated circuit fabrication Public/Granted day:2016-02-02
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