Invention Grant
US09368329B2 Methods and apparatus for synchronizing RF pulses in a plasma processing system
有权
用于在等离子体处理系统中同步RF脉冲的方法和装置
- Patent Title: Methods and apparatus for synchronizing RF pulses in a plasma processing system
- Patent Title (中): 用于在等离子体处理系统中同步RF脉冲的方法和装置
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Application No.: US13550719Application Date: 2012-07-17
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Publication No.: US09368329B2Publication Date: 2016-06-14
- Inventor: John C. Valcore, Jr. , Bradford J. Lyndaker , Harmeet Singh
- Applicant: John C. Valcore, Jr. , Bradford J. Lyndaker , Harmeet Singh
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A synchronized pulsing arrangement for providing at least two synchronized pulsing RF signals to a plasma processing chamber of a plasma processing system is provided. The arrangement includes a first RF generator for providing a first RF signal. The first RF signal is provided to the plasma processing chamber to energize a plasma therein, the first RF signal representing a pulsing RF signal. The arrangement also includes a second RF generator for providing a second RF signal to the plasma processing chamber. The second RF generator has a sensor subsystem for detecting values of at least one parameter associated with the plasma processing chamber that reflects whether the first RF signal is pulsed high or pulsed low and a pulse controlling subsystem for pulsing the second RF signal responsive to the detecting the values of at least one parameter.
Public/Granted literature
- US20130214828A1 METHODS AND APPARATUS FOR SYNCHRONIZING RF PULSES IN A PLASMA PROCESSING SYSTEM Public/Granted day:2013-08-22
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