Invention Grant
- Patent Title: Compliant micro device transfer head
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Application No.: US14723231Application Date: 2015-05-27
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Publication No.: US09370864B2Publication Date: 2016-06-21
- Inventor: Andreas Bibl , John A. Higginson , Hsin-Hua Hu
- Applicant: LuxVue Technology Corporation
- Applicant Address: US CA Cupertino
- Assignee: Apple Inc.
- Current Assignee: Apple Inc.
- Current Assignee Address: US CA Cupertino
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: G01P15/125
- IPC: G01P15/125 ; B25J15/00 ; H01L25/075 ; H01L21/683 ; B81C99/00 ; H01L21/67 ; H01L33/00 ; H01L23/00
Abstract:
A compliant micro device transfer head and head array are disclosed. In an embodiment a micro device transfer head includes a spring portion that is deflectable into a space between a base substrate and the spring portion.
Public/Granted literature
- US20150273700A1 COMPLIANT MICRO DEVICE TRANSFER HEAD Public/Granted day:2015-10-01
Information query
IPC分类:
