Invention Grant
- Patent Title: Low-profile stacked-die MEMS resonator system
- Patent Title (中): 薄型叠层式MEMS谐振器系统
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Application No.: US14597825Application Date: 2015-01-15
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Publication No.: US09371221B2Publication Date: 2016-06-21
- Inventor: Pavan Gupta , Aaron Partridge , Markus Lutz
- Applicant: SiTime Corporation
- Applicant Address: US CA Sunnyvale
- Assignee: SiTime Corporation
- Current Assignee: SiTime Corporation
- Current Assignee Address: US CA Sunnyvale
- Agent Charles Shemwell
- Main IPC: H01L23/48
- IPC: H01L23/48 ; B81B7/00 ; B81C1/00 ; H01L23/34 ; H01L23/498 ; H01L23/31

Abstract:
A low-profile packaging structure for a microelectromechanical-system (MEMS) resonator system includes an electrical lead having internal and external electrical contact surfaces at respective first and second heights within a cross-sectional profile of the packaging structure and a die-mounting surface at an intermediate height between the first and second heights. A resonator-control chip is mounted to the die-mounting surface of the electrical lead such that at least a portion of the resonator-control chip is disposed between the first and second heights and wire-bonded to the internal electrical contact surface of the electrical lead. A MEMS resonator chip is mounted to the resonator-control chip in a stacked die configuration and the MEMS resonator chip, resonator-control chip and internal electrical contact and die-mounting surfaces of the electrical lead are enclosed within a package enclosure that exposes the external electrical contact surface of the electrical lead at an external surface of the packaging structure.
Public/Granted literature
- US20150123220A1 LOW-PROFILE STACKED-DIE MEMS RESONATOR SYSTEM Public/Granted day:2015-05-07
Information query
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