Invention Grant
- Patent Title: Automatic initiation of reference spectra library generation for optical monitoring
- Patent Title (中): 用于光学监测的自动启动参考光谱库生成
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Application No.: US14195519Application Date: 2014-03-03
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Publication No.: US09372116B2Publication Date: 2016-06-21
- Inventor: Jeffrey Drue David , Jun Qian
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B37/013
- IPC: B24B37/013 ; G01J3/46 ; B24B37/04 ; B24B49/12
Abstract:
A method of generating reference spectra includes polishing a first substrate in a polishing apparatus, measuring a sequence of spectra from the first substrate during polishing with an in-situ optical monitoring system, for each spectrum in the sequence of spectra, determining a best matching reference spectrum from a first plurality of first reference spectra to generate a sequence of reference spectra, calculating a value of a metric of fit of the sequence of spectra to the sequence of reference spectra, comparing the value of the metric of fit to a threshold value and determining whether to generate a second library based on the comparison, and if the second library is determined to be generated, storing the sequence of spectra as a second plurality of reference spectra.
Public/Granted literature
- US20140176949A1 Automatic Initiation Of Reference Spectra Library Generation For Optical Monitoring Public/Granted day:2014-06-26
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