Invention Grant
- Patent Title: Mems having a cutout section on concave portion of a substrate
- Patent Title (中): 在基板的凹部具有切口部的金属件
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Application No.: US14687057Application Date: 2015-04-15
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Publication No.: US09376313B2Publication Date: 2016-06-28
- Inventor: Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2014-086583 20140418
- Main IPC: G01L9/00
- IPC: G01L9/00 ; H01L21/00 ; H05K7/02 ; G01P15/08 ; B81C1/00 ; H01L23/00 ; B81B3/00 ; H01L23/528 ; H01L21/762 ; B81B7/00 ; G01C19/5656

Abstract:
According to an aspect of the invention, a functional element includes a substrate which is provided with a concave section; a stationary section connected to a wall section that defines the concave section of the substrate; an elastic section which extends from the stationary section and is capable of stretching and contracting in a first axis direction; a movable body connected to the elastic section; a movable electrode section which extends from the movable body. The concave section includes a cutout section which is provided on the wall section. The stationary section includes an overlap section which is spaced with the substrate, and overlaps the concave section when seen in a plan view. At least a portion of the overlap section overlaps the cutout section when seen in the plan view, and the elastic section extends from the overlap section.
Public/Granted literature
- US20150303153A1 FUNCTIONAL ELEMENT, ELECTRONIC APPARATUS AND MOBILE ENTITY Public/Granted day:2015-10-22
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