Invention Grant
- Patent Title: Transducer structure and method for MEMS devices
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Application No.: US13922539Application Date: 2013-06-20
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Publication No.: US09377487B2Publication Date: 2016-06-28
- Inventor: Daniel N. Koury, Jr. , Sudheer Sridharamurthy
- Applicant: mCube Inc.
- Applicant Address: US CA San Jose
- Assignee: mCube Inc.
- Current Assignee: mCube Inc.
- Current Assignee Address: US CA San Jose
- Agency: Kilpatrick Townsend and Stockton LLP
- Main IPC: H01G7/00
- IPC: H01G7/00 ; G01R3/00 ; G01P15/125 ; B81B3/00 ; G01C19/5783 ; G01P15/08

Abstract:
An improved MEMS transducer apparatus and method is provided. The apparatus has a movable base structure including an outer surface region and at least one portion removed to form at least one inner surface region. At least one intermediate anchor structure is disposed within the inner surface region. The apparatus includes an intermediate spring structure operably coupled to the central anchor structure, and at least one portion of the inner surface region. A capacitor element is disposed within the inner surface region.
Public/Granted literature
- US20150241479A1 TRANSDUCER STRUCTURE AND METHOD FOR MEMS DEVICES Public/Granted day:2015-08-27
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