Invention Grant
US09378907B2 Liquid MEMS component responsive to pressure 有权
液体MEMS组件响应压力

Liquid MEMS component responsive to pressure
Abstract:
A liquid micro-electro-mechanical system (MEMS) component includes a board, a channel frame, a flexible channel side, a liquid droplet, and one or more conductive elements. The channel frame is within the board and mates with the flexible channel side to form a channel within the board. The liquid droplet is contained within the channel. When a pressure is applied to the flexible side, the shape of the liquid droplet is changed with respect to the one or more conductive elements thereby changing an operational characteristic of the liquid MEMS component.
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