Invention Grant
- Patent Title: Liquid MEMS component responsive to pressure
- Patent Title (中): 液体MEMS组件响应压力
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Application No.: US13717479Application Date: 2012-12-17
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Publication No.: US09378907B2Publication Date: 2016-06-28
- Inventor: Ahmadreza Rofougaran
- Applicant: Broadcom Corporation
- Applicant Address: US CA Irvine
- Assignee: BROADCOM CORPORATION
- Current Assignee: BROADCOM CORPORATION
- Current Assignee Address: US CA Irvine
- Agency: Garlick & Markison
- Agent Bruce E. Garlick
- Main IPC: H01H29/00
- IPC: H01H29/00 ; H01H29/02 ; B81B3/00 ; H01G5/013 ; H01H1/00

Abstract:
A liquid micro-electro-mechanical system (MEMS) component includes a board, a channel frame, a flexible channel side, a liquid droplet, and one or more conductive elements. The channel frame is within the board and mates with the flexible channel side to form a channel within the board. The liquid droplet is contained within the channel. When a pressure is applied to the flexible side, the shape of the liquid droplet is changed with respect to the one or more conductive elements thereby changing an operational characteristic of the liquid MEMS component.
Public/Granted literature
- US20140071583A1 Liquid MEMS Component Responsive to Pressure Public/Granted day:2014-03-13
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