Invention Grant
US09378922B2 Electron microscope and electron microscope sample retaining device
有权
电子显微镜和电子显微镜样品保持装置
- Patent Title: Electron microscope and electron microscope sample retaining device
- Patent Title (中): 电子显微镜和电子显微镜样品保持装置
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Application No.: US14417345Application Date: 2013-06-19
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Publication No.: US09378922B2Publication Date: 2016-06-28
- Inventor: Toshie Yaguchi , Yasuhira Nagakubo
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, PC
- Priority: JP2012-166492 20120727
- International Application: PCT/JP2013/066776 WO 20130619
- International Announcement: WO2014/017225 WO 20140130
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/20 ; H01J37/244

Abstract:
An object of the invention is to provide an electron microscope which can easily and safely prepare a gas or liquid environment in the electron microscope and can observe a specimen in the environment and a reaction of the specimen at a high resolution and to provide a specimen holder for the electron microscope. In the electron microscope including specimen holding means (6) for holding a specimen (23), the specimen (23) is placed in a capillary (17) through which electron beams are transmittable, the electron microscope includes a supply device for supplying gas or liquid into the capillary (17) and a collection device for collecting the gas or the liquid, and the electron microscope obtains a specimen image of the specimen while flowing the gas or the liquid.
Public/Granted literature
- US20150179396A1 ELECTRON MICROSCOPE AND ELECTRON MICROSCOPE SAMPLE RETAINING DEVICE Public/Granted day:2015-06-25
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