Invention Grant
- Patent Title: Selective etching of silicon wafer
- Patent Title (中): 硅片的选择性蚀刻
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Application No.: US14300679Application Date: 2014-06-10
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Publication No.: US09378966B2Publication Date: 2016-06-28
- Inventor: Brown C. Peethala , Spyridon Skordas , Da Song , Allan Upham , Kevin R. Winstel
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent L. Jeffrey Kelly; Kenneth R. Corsello
- Main IPC: H01L21/306
- IPC: H01L21/306 ; H01L21/67 ; C09K13/08 ; H01L29/167

Abstract:
A method of preparing an etch solution and thinning semiconductor wafers using the etch solution is proposed. The method includes steps of creating a mixture of hydrofluoric acid, nitric acid, and acetic acid in a solution container in an approximate 1:3:5 ratio; causing the mixture to react with portions of one or more silicon wafers, the portions of the one or more silicon wafers are doped with boron in a level no less than 1×1019 atoms/cm3; collecting the mixture after reacting with the boron doped portions of the one or more silicon wafers; and adding collected mixture back into the solution container to create the etch solution.
Public/Granted literature
- US20150357197A1 SELECTIVE ETCHING OF SILICON WAFER Public/Granted day:2015-12-10
Information query
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