Invention Grant
US09379143B2 Active matrix substrate, display device, and active matrix substrate manufacturing method 有权
有源矩阵基板,显示装置和有源矩阵基板制造方法

Active matrix substrate, display device, and active matrix substrate manufacturing method
Abstract:
An active matrix substrate (1) includes a source electrode (32), a drain electrode (33), and a semiconductor layer (31) of oxide semiconductor. A gate insulating layer (42) of silicon oxide is formed on the gate electrode (12a); a source electrode (32), a drain electrode (33), and a semiconductor layer (31) are formed on the gate insulating layer (42); a first protection layer (44) of silicon nitride is formed on the gate insulating layer (42) without covering the semiconductor layer (31); and a second protection layer (46) of silicon oxide is formed on the semiconductor layer (31). The first protection layer (44) covers the signal line (14) and the source connection line (36).
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