Invention Grant
US09379143B2 Active matrix substrate, display device, and active matrix substrate manufacturing method
有权
有源矩阵基板,显示装置和有源矩阵基板制造方法
- Patent Title: Active matrix substrate, display device, and active matrix substrate manufacturing method
- Patent Title (中): 有源矩阵基板,显示装置和有源矩阵基板制造方法
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Application No.: US14008183Application Date: 2012-03-22
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Publication No.: US09379143B2Publication Date: 2016-06-28
- Inventor: Katsunori Misaki
- Applicant: Katsunori Misaki
- Applicant Address: JP Osaka
- Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee Address: JP Osaka
- Agency: Keating & Bennett, LLP
- Priority: JP2011-074033 20110330
- International Application: PCT/JP2012/057325 WO 20120322
- International Announcement: WO2012/133103 WO 20121004
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L29/10 ; H01L27/12 ; H01L29/786 ; H01L27/32 ; G02F1/1362 ; G02F1/1345 ; G02F1/1333

Abstract:
An active matrix substrate (1) includes a source electrode (32), a drain electrode (33), and a semiconductor layer (31) of oxide semiconductor. A gate insulating layer (42) of silicon oxide is formed on the gate electrode (12a); a source electrode (32), a drain electrode (33), and a semiconductor layer (31) are formed on the gate insulating layer (42); a first protection layer (44) of silicon nitride is formed on the gate insulating layer (42) without covering the semiconductor layer (31); and a second protection layer (46) of silicon oxide is formed on the semiconductor layer (31). The first protection layer (44) covers the signal line (14) and the source connection line (36).
Public/Granted literature
- US20140042439A1 ACTIVE MATRIX SUBSTRATE, DISPLAY DEVICE, AND ACTIVE MATRIX SUBSTRATE MANUFACTURING METHOD Public/Granted day:2014-02-13
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