Invention Grant
US09381614B2 Pressure regulator, polishing apparatus having the pressure regulator, and polishing method 有权
压力调节器,具有压力调节器的抛光装置和抛光方法

Pressure regulator, polishing apparatus having the pressure regulator, and polishing method
Abstract:
A pressure regulator includes: a pressure-regulating valve configured to regulate pressure of a fluid supplied from a fluid supply source; a first pressure sensor configured to measure the pressure regulated by the pressure-regulating valve; a second pressure sensor located downstream of the first pressure sensor; a PID controller configured to produce a correction pressure command value for eliminating a difference between a pressure command value and a pressure value of the fluid measured by the second pressure sensor; and a regulator controller configured to control operation of the pressure-regulating valve so as to eliminate a difference between the correction pressure command value and a pressure value of the fluid measured by the first pressure sensor.
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