Invention Grant
- Patent Title: Non-contact transfer hand
- Patent Title (中): 非接触转让手
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Application No.: US14692931Application Date: 2015-04-22
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Publication No.: US09381652B2Publication Date: 2016-07-05
- Inventor: Nobuhira Abe
- Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Applicant Address: JP Toyota-shi
- Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee Address: JP Toyota-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P
- Priority: JP2014-091344 20140425
- Main IPC: B25J15/06
- IPC: B25J15/06 ; H01L21/683

Abstract:
A non-contact transfer hand includes a suction holding plate and a lid portion. The suction holding plate has a flat-shaped suction surface as a front surface, a non-suction surface as a back surface, and a chamber. The suction surface has a gas discharge groove. The non-suction surface has a gas supply groove that has a gas introduction port. The chamber communicates with an end of the gas supply groove. A wall surface of the chamber has an inlet. The gas supply groove is configured to supply gas from the gas introduction port toward the chamber. The gas discharge groove communicates with the chamber via the inlet, and is configured to discharge the gas in a direction apart from the chamber. The lid portion is fixed on the non-suction surface to cover the gas supply groove and the chamber.
Public/Granted literature
- US20150306774A1 NON-CONTACT TRANSFER HAND Public/Granted day:2015-10-29
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