Invention Grant
- Patent Title: Device for stripping a product substrate from a carrier substrate
- Patent Title (中): 用于从载体衬底剥离产品衬底的装置
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Application No.: US14552523Application Date: 2014-11-25
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Publication No.: US09381732B2Publication Date: 2016-07-05
- Inventor: Friedrich Paul Lindner , Jurgen Burggraf
- Applicant: EV Group GmbH
- Applicant Address: AT St. Florian
- Assignee: EV Group GmbH
- Current Assignee: EV Group GmbH
- Current Assignee Address: AT St. Florian
- Agency: Kusner & Jaffe
- Priority: EP09011198 20090901
- Main IPC: B32B38/10
- IPC: B32B38/10 ; B32B43/00 ; H01L21/683 ; H01L21/67

Abstract:
Device for stripping a product substrate from a carrier substrate connected to the product substrate by an interconnect layer by means of a flexible film that is mounted on a film frame and that comprises an adhesive layer for holding the product substrate in a bonding surface section of the film, the film being mounted on the film frame in an attachment section of the film that surrounds the bonding surface section, and the film comprising a stripping section that is located between the bonding surface section and the attachment section, the device having stripping means for effecting a stripping of the product substrate from the carrier substrate from a periphery of the product substrate.
Public/Granted literature
- US20150075725A1 DEVICE FOR STRIPPING A PRODUCT SUBSTRATE FROM A CARRIER SUBSTRATE Public/Granted day:2015-03-19
Information query