Invention Grant
- Patent Title: Polarization-sensitive optical measurement instrument
- Patent Title (中): 极化敏感光学测量仪器
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Application No.: US14083599Application Date: 2013-11-19
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Publication No.: US09383188B2Publication Date: 2016-07-05
- Inventor: Kentaro Osawa , Tatsuro Ide , Masaki Mukoh
- Applicant: Hitachi-Lg Data Storage, Inc.
- Applicant Address: JP Tokyo
- Assignee: HITACHI-LG DATA STORAGE, INC.
- Current Assignee: HITACHI-LG DATA STORAGE, INC.
- Current Assignee Address: JP Tokyo
- Agency: Baker Botts L.L.P.
- Priority: JP2012-265630 20121204
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
A beam emitted from a light source is split into a probe beam that irradiates a measurement object and a reference beam that does not irradiate the measurement object. A signal beam obtained by the reflection of the probe beam is split into first and second split signal beams, which are mutually orthogonal polarized components. The first split signal beam and the reference beam are inputted to a first coherence optical system to cause the beams to interfere with each other to generate at least three coherence beams differing in phasic relationship. The second split signal beam and the reference beam are inputted to a second coherence optical system to cause the beams to interfere with each other to generate at least three coherence beams differing in phasic relationship. The coherence beams are then detected.
Public/Granted literature
- US20140152996A1 POLARIZATION-SENSITIVE OPTICAL MEASUREMENT INSTRUMENT Public/Granted day:2014-06-05
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