Invention Grant
US09383282B2 MEMS capacitive pressure sensor, operating method and manufacturing method
有权
MEMS电容式压力传感器，操作方法及制造方法
- Patent Title: MEMS capacitive pressure sensor, operating method and manufacturing method
- Patent Title (中): MEMS电容式压力传感器，操作方法及制造方法
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Application No.: US13462582Application Date: 2012-05-02
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Publication No.: US09383282B2Publication Date: 2016-07-05
- Inventor: Willem Frederik Adrianus Besling , Klaus Reimann , Peter Steeneken , Olaf Wunnicke , Reinout Woltjer
- Applicant: Willem Frederik Adrianus Besling , Klaus Reimann , Peter Steeneken , Olaf Wunnicke , Reinout Woltjer
- Applicant Address: CH Rapperswil-Jona
- Assignee: AMS INTERNATIONAL AG
- Current Assignee: AMS INTERNATIONAL AG
- Current Assignee Address: CH Rapperswil-Jona
- Agency: McDermott Will & Emery LLP
- Priority: EP11164756 20110504
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L9/12 ; G01L19/00 ; G01L27/00
Abstract:
A MEMS pressure sensor wherein at least one of the electrode arrangements comprises an inner electrode and an outer electrode arranged around the inner electrode. The capacitances associated with the inner electrode and the outer electrode are independently measured and can be differentially measured. This arrangement enables various different read out schemes to be implemented and also enables improved compensation for variations between devices or changes in device characteristics over time.
Public/Granted literature
- US20130118265A1 MEMS CAPACITIVE PRESSURE SENSOR, OPERATING METHOD AND MANUFACTURING METHOD Public/Granted day:2013-05-16
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