Invention Grant
- Patent Title: Pressure transducer with capacitively coupled source electrode
- Patent Title (中): 带电容耦合源电极的压力传感器
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Application No.: US14157235Application Date: 2014-01-16
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Publication No.: US09383283B2Publication Date: 2016-07-05
- Inventor: Marcos A. Nassar , Ernest W. Cordan , Mark L. Urban
- Applicant: Kavlico Corporation
- Applicant Address: US MA Attleboro
- Assignee: Sensata Technologies, Inc.
- Current Assignee: Sensata Technologies, Inc.
- Current Assignee Address: US MA Attleboro
- Agency: Banner & Witcoff, Ltd.
- Main IPC: G01L9/12
- IPC: G01L9/12 ; G01L9/00 ; G01L1/14 ; H01G5/16

Abstract:
A capacitive pressure transducer of an embodiment of the present invention capacitively couples two electrodes on a substrate with a diaphragm electrode to form a transducing circuit without the need for a physical connection between the electrodes. Embodiments of the present invention have a substrate with a coupling electrode and a sensing electrode and an attached diaphragm with a diaphragm electrode. A spacer positioned between the substrate and the diaphragm provides for a cavity that defines a gap between the sensing electrode and the diaphragm electrode. A dielectric spacer may be positioned over the coupling electrode to increase the capacitance between the coupling electrode and the diaphragm electrode. The capacitive pressure transducer has similar electrical characteristics as existing capacitive pressure transducers, is easier to manufacture, and has long-term reliability and durability improvements brought about by the elimination of mechanical interconnects and additional conductive materials.
Public/Granted literature
- US20150198495A1 Pressure Transducer With Capacitively Coupled Source Electrode Public/Granted day:2015-07-16
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