Invention Grant
- Patent Title: Inspection apparatus and inspection method
- Patent Title (中): 检验仪器和检验方法
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Application No.: US14465435Application Date: 2014-08-21
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Publication No.: US09383321B2Publication Date: 2016-07-05
- Inventor: Hidetoshi Nakanishi , Akira Ito , Iwao Kawayama , Masayoshi Tonouchi
- Applicant: DAINIPPON SCREEN MFG. CO., LTD. , OSAKA UNIVERSITY
- Applicant Address: JP Kyoto JP Osaka
- Assignee: SCREEN HOLDINGS CO., LTD.,OSAKA UNIVERSITY
- Current Assignee: SCREEN HOLDINGS CO., LTD.,OSAKA UNIVERSITY
- Current Assignee Address: JP Kyoto JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2013-173140 20130823
- Main IPC: G01N21/64
- IPC: G01N21/64
Abstract:
An inspection apparatus is an apparatus for inspecting a solar cell panel. The inspection apparatus includes: an excitation light irradiation part for irradiating the solar cell panel with pulsed light for causing the solar cell panel to radiate an electromagnetic wave pulse; a detection part for detecting the electromagnetic wave pulse radiated from the solar cell panel in response to irradiation with the pulsed light; and a temperature changing part for changing a temperature of the solar cell panel at a part irradiated with the pulsed light.
Public/Granted literature
- US20150053869A1 INSPECTION APPARATUS AND INSPECTION METHOD Public/Granted day:2015-02-26
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