Invention Grant
- Patent Title: Physical quantity sensor, manufacturing method thereof, and electronic apparatus
- Patent Title (中): 物理量传感器,其制造方法和电子设备
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Application No.: US13858284Application Date: 2013-04-08
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Publication No.: US09383383B2Publication Date: 2016-07-05
- Inventor: Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2012-089275 20120410
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/08

Abstract:
A physical quantity sensor includes: a substrate; a first movable body that is provided on the substrate and includes first movable electrode sections; first fixed electrode sections disposed on the substrate so as to face the first movable electrode sections; a second movable body that is provided on the substrate and includes second movable electrode sections; and second fixed electrode sections disposed on the substrate so as to face the second movable electrode sections. A post section protruding from the principal surface of the substrate is provided in a portion of the substrate located between the first and second movable bodies in plan view.
Public/Granted literature
- US20140069190A1 PHYSICAL QUANTITY SENSOR, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS Public/Granted day:2014-03-13
Information query
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