Invention Grant
US09383383B2 Physical quantity sensor, manufacturing method thereof, and electronic apparatus 有权
物理量传感器,其制造方法和电子设备

Physical quantity sensor, manufacturing method thereof, and electronic apparatus
Abstract:
A physical quantity sensor includes: a substrate; a first movable body that is provided on the substrate and includes first movable electrode sections; first fixed electrode sections disposed on the substrate so as to face the first movable electrode sections; a second movable body that is provided on the substrate and includes second movable electrode sections; and second fixed electrode sections disposed on the substrate so as to face the second movable electrode sections. A post section protruding from the principal surface of the substrate is provided in a portion of the substrate located between the first and second movable bodies in plan view.
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