Invention Grant
- Patent Title: Prober and needle-tip polishing device for probe card
- Patent Title (中): 探针卡探头和针尖抛光装置
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Application No.: US14601573Application Date: 2015-01-21
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Publication No.: US09383389B2Publication Date: 2016-07-05
- Inventor: Kazuya Yano , Shuji Akiyama
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2014-009725 20140122
- Main IPC: G01R31/20
- IPC: G01R31/20 ; G01R1/073 ; B24B19/16 ; G01R3/00

Abstract:
A prober 10 including a probe card 16 having multiple probe needles 17 includes a needle-tip polishing unit 24, and the needle-tip polishing unit 24 includes a WAPP 28 to be contacted with needle tips and a supporting member 27 configured to support the WAPP 28. On a top surface of the WAPP 28, a wrapping sheet 29 is provided, and the WAPP 28 includes multiple recesses 31 formed on a bottom surface 30 thereof and the supporting member 27 includes multiple protrusions 33 formed on a ceiling surface 32 thereof. When the WAPP 28 is moved to a retreat position, the protrusions 33 are respectively inserted and fitted into the recesses 31, and when the WAPP 28 is moved to a contact position, top portions of the protrusions 33 are respectively brought into contact with portions on the bottom surface 30 where the recesses 31 are not formed.
Public/Granted literature
- US20150204909A1 PROBER AND NEEDLE-TIP POLISHING DEVICE FOR PROBE CARD Public/Granted day:2015-07-23
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