Invention Grant
- Patent Title: Magnification observation device
- Patent Title (中): 放大观察装置
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Application No.: US13648571Application Date: 2012-10-10
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Publication No.: US09383569B2Publication Date: 2016-07-05
- Inventor: Woobum Kang
- Applicant: Keyence Corporation
- Applicant Address: JP Osaka
- Assignee: Keyence Corporation
- Current Assignee: Keyence Corporation
- Current Assignee Address: JP Osaka
- Agency: Kilyk & Bowersox, P.L.L.C.
- Priority: JP2011-227395 20111014
- Main IPC: G02B21/36
- IPC: G02B21/36 ; G02B21/24 ; H04N5/232 ; G01N21/64

Abstract:
Provided is a magnification observation device in which a focus of the imaging unit can be focused on the observation surface of the object in observation object region in a short period of time. An unit region of an observation object is imaged at a plurality of Z-positions by moving a object lens in the light-axis direction, the plurality of pieces of image data corresponding to the unit region are captured. An image of the observation object is displayed in the display unit as a navigation image. Shape data which indicates the position of the surface of the observation object in the unit region is generated. An observation object region on observation object is designated based on the navigation image. Based on the generated shape data, a focus of the object lens is on the surface of the observation object on the observation object region designated.
Public/Granted literature
- US20130093872A1 Magnification Observation Device Public/Granted day:2013-04-18
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