Invention Grant
US09383575B2 Method for orientating a grid mirror and grid mirror device 有权
定向网格镜和网格镜设备的方法

Method for orientating a grid mirror and grid mirror device
Abstract:
A method is described for aligning a light beam, having the steps of: deflecting the light beam by way of a first mirror element and a second mirror element, the first mirror element being displaced through a first deflection angle around a first rotation axis, and the second mirror element being displaced through a second deflection angle around a second rotation axis inclined with respect to the first rotation axis, and the second mirror element being additionally displaced through a third deflection angle around a third rotation axis that is inclined with respect to the second rotation axis, and the first mirror element being displaced around a first mirror normal line of the first mirror element through a first compensation angle defined for the third deflection angle, and/or the second mirror element being displaced around a second mirror normal line of the second mirror element through a second compensation angle defined for the third deflection angle.
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