Invention Grant
US09383578B2 Optical scanner apparatus and optical scanner control apparatus 有权
光学扫描仪和光学扫描仪控制装置

Optical scanner apparatus and optical scanner control apparatus
Abstract:
An optical scanner apparatus includes first and second torsion beams which support a mirror support portion supporting a mirror from both sides in an axial direction; first and second horizontal driving beams configured to include first and second horizontal driving sources, respectively, a connecting beam; a first piezo-electric sensor; first and second sensor interconnects connected to one of and the other of an upper electrode and a lower electrode of the first piezo-electric sensor, respectively, the first sensor interconnect and the second sensor interconnect being formed to extend toward the first horizontal driving beam and the second horizontal driving beam, respectively.
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