Invention Grant
- Patent Title: Resist film and method of forming pattern
- Patent Title (中): 抗蚀膜和成型方式
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Application No.: US14563893Application Date: 2014-12-08
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Publication No.: US09383647B2Publication Date: 2016-07-05
- Inventor: Su Il Kim
- Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2013-0155692 20131213
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/16 ; G03F7/30

Abstract:
Disclosed herein is a resist film including: a pattern forming resist layer; and a liquid contact preventing resist layer adhered to any one surface of upper and lower surfaces of the pattern forming resist layer, in order to prevent a physical and chemical change of a resist due to a spray pressure applied when a developing solution is sprayed in a development process.
Public/Granted literature
- US20150168839A1 RESIST FILM AND METHOD OF FORMING PATTERN Public/Granted day:2015-06-18
Information query
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