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US09383647B2 Resist film and method of forming pattern 有权
抗蚀膜和成型方式

Resist film and method of forming pattern
Abstract:
Disclosed herein is a resist film including: a pattern forming resist layer; and a liquid contact preventing resist layer adhered to any one surface of upper and lower surfaces of the pattern forming resist layer, in order to prevent a physical and chemical change of a resist due to a spray pressure applied when a developing solution is sprayed in a development process.
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