Invention Grant
- Patent Title: Flow rate range variable type flow rate control apparatus
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Application No.: US14977162Application Date: 2015-12-21
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Publication No.: US09383758B2Publication Date: 2016-07-05
- Inventor: Tadahiro Ohmi , Masahito Saito , Shoichi Hino , Tsuyoshi Shimazu , Kazuyuki Miura , Kouji Nishino , Masaaki Nagase , Katsuyuki Sugita , Kaoru Hirata , Ryousuke Dohi , Takashi Hirose , Tsutomu Shinohara , Nobukazu Ikeda , Tomokazu Imai , Toshihide Yoshida , Hisashi Tanaka
- Applicant: Fujikin Incorporated , National University Corporation Tohoku University , Tokyo Electron Ltd.
- Applicant Address: JP Osaka JP Miyagi JP Tokyo
- Assignee: Fujikin Incorporated,National University Corporation Tohoku University,Tokyo Electron Ltd.
- Current Assignee: Fujikin Incorporated,National University Corporation Tohoku University,Tokyo Electron Ltd.
- Current Assignee Address: JP Osaka JP Miyagi JP Tokyo
- Agency: Griffin and Szipl PC
- Priority: JP2005-185845 20050627
- Main IPC: G05D7/06
- IPC: G05D7/06 ; G01F1/684

Abstract:
A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m(P1−P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.
Public/Granted literature
- US20160109886A1 FLOW RATE RANGE VARIABLE TYPE FLOW RATE CONTROL APPARATUS Public/Granted day:2016-04-21
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