Invention Grant
- Patent Title: Plasma processing apparatus
- Patent Title (中): 等离子体处理装置
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Application No.: US13410331Application Date: 2012-03-02
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Publication No.: US09384946B2Publication Date: 2016-07-05
- Inventor: Kohei Sato , Kazunori Nakamoto , Yutaka Ohmoto
- Applicant: Kohei Sato , Kazunori Nakamoto , Yutaka Ohmoto
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Baker Botts L.L.P.
- Priority: JP2012-003691 20120112
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01J37/32 ; H01L21/67 ; H01L21/687

Abstract:
In a plasma processing apparatus having a processing chamber, a sample stage, a sample, a dielectric-composed insulating film and an electrode, the sample stage can be divided into an upper member and a lower member, the upper member including the insulating film and an electrode, the apparatus includes a socket which is deployed inside a through hole of the upper member, and which is electrically connected to the electrode, a pin which is brought into contact with the socket by being inserted into the socket, and a seal member which is attached onto the socket in order to implement a hermetic sealing between the upper-member side and the lower-member side inside the through hole, the upper-member side being continuously linked to the decompressed processing chamber, the lower-member side being continuously linked to the substantially-atmospheric-pressure side which is the outside of the processing chamber.
Public/Granted literature
- US20130180662A1 PLASMA PROCESSING APPARATUS Public/Granted day:2013-07-18
Information query
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