Invention Grant
- Patent Title: Chamber coatings
- Patent Title (中): 室内涂料
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Application No.: US14601274Application Date: 2015-01-21
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Publication No.: US09384950B2Publication Date: 2016-07-05
- Inventor: Ren-Guan Duan , Juan Carlos Rocha-Alvarez , Jianhua Zhou , Ningli Liu , Yihong Chen , Abhijit Basu Mallick , Sudhir R. Gondhalekar
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: C04B35/00
- IPC: C04B35/00 ; H01J37/32 ; C09D1/00
Abstract:
In one embodiment, a processing chamber is disclosed wherein at least one surface of the processing chamber has a coating comprising SivYwMgxAlyOz, wherein v ranges from about 0.0196 to 0.2951, w ranges from about 0.0131 to 0.1569, x ranges from about 0.0164 to 0.0784, y ranges from about 0.0197 to 0.1569, z ranges from about 0.5882 to 0.6557, and v+w+x+y+z=1.
Public/Granted literature
- US20150221480A1 CHAMBER COATINGS Public/Granted day:2015-08-06
Information query
