Invention Grant
- Patent Title: Titanium nitride electrode
- Patent Title (中): 氮化钛电极
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Application No.: US14543107Application Date: 2014-11-17
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Publication No.: US09384990B2Publication Date: 2016-07-05
- Inventor: Silke Musa
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP13193749 20131121
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/28 ; H01L21/285 ; H01L29/45 ; G01N27/403 ; G01N27/30 ; H01L21/00 ; H01L21/8238
Abstract:
The present invention relates to a method for decreasing the impedance of a titanium nitride element for use in an electrode component. The method comprises obtaining a titanium nitride element and hydrothermally treating the titanium nitride element by immersing the titanium nitride element in a liquid comprising water while heating said liquid.
Public/Granted literature
- US20150137275A1 Titanium Nitride Electrode Public/Granted day:2015-05-21
Information query
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