Invention Grant
- Patent Title: Apparatus and methods for handling workpieces of different sizes
- Patent Title (中): 用于处理不同尺寸工件的装置和方法
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Application No.: US13567507Application Date: 2012-08-06
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Publication No.: US09385017B2Publication Date: 2016-07-05
- Inventor: James P. Fazio , David K. Foote , James D. Getty
- Applicant: James P. Fazio , David K. Foote , James D. Getty
- Applicant Address: US OH Westlake
- Assignee: Nordson Corporation
- Current Assignee: Nordson Corporation
- Current Assignee Address: US OH Westlake
- Agency: Baker & Hostetler LLP
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/687 ; C23C16/458
Abstract:
Apparatus and methods for plasma processing workpieces of different diameters. The apparatus includes a lift plate having an outer perimeter, an opening inside of the outer perimeter, and a gap extending between the opening and the outer perimeter. The lift plate includes annular rims of different inner diameters and that are configured to respectively support the first and second workpieces.
Public/Granted literature
- US20140034610A1 APPARATUS AND METHODS FOR HANDLING WORKPIECES OF DIFFERENT SIZES Public/Granted day:2014-02-06
Information query
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