Invention Grant
US09385018B2 Semiconductor manufacturing equipment with trace elements for improved defect tracing and methods of manufacture
有权
具有微量元素的半导体制造设备，用于改进缺陷跟踪和制造方法
- Patent Title: Semiconductor manufacturing equipment with trace elements for improved defect tracing and methods of manufacture
- Patent Title (中): 具有微量元素的半导体制造设备，用于改进缺陷跟踪和制造方法
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Application No.: US13735866Application Date: 2013-01-07
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Publication No.: US09385018B2Publication Date: 2016-07-05
- Inventor: Dennis Winters , Victor Coots , Matthew Burnham , Daniel Thevis
- Applicant: Samsung Austin Semiconductor , Samsung Electronics Co., Ltd.
- Applicant Address: US TX Austin
- Assignee: Samsung Austin Semiconductor, L.P.
- Current Assignee: Samsung Austin Semiconductor, L.P.
- Current Assignee Address: US TX Austin
- Main IPC: G01N19/00
- IPC: G01N19/00 ; G01N33/00 ; H01L21/677 ; H01L21/67 ; H01L21/66
Abstract:
A semiconductor manufacturing equipment comprising trace elements and method of manufacture are disclosed. The semiconductor manufacturing equipment includes one or more components, wherein at least one component is made from an alloy comprising one or more materials and one or more rare earth elements (REEs). The alloy comprises predetermined quantities of the respective REEs. The method for manufacturing a component includes forming an alloy comprising at least one material and one or more selected rare earth elements (REEs) and building the component with the alloy.
Public/Granted literature
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