Invention Grant
- Patent Title: Methods of forming gated devices
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Application No.: US14836130Application Date: 2015-08-26
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Publication No.: US09385045B2Publication Date: 2016-07-05
- Inventor: Carlo Pozzi , Marcello Mariani , Gianpietro Carnevale
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/8234 ; H01L21/28 ; H01L29/49 ; H01L29/66 ; H01L21/02 ; H01L21/306 ; H01L21/308 ; H01L21/3213 ; H01L21/8222

Abstract:
Some embodiments include methods of forming gated devices. An upper region of a semiconductor material is patterned into a plurality of walls that extend primarily along a first direction. The walls are spaced from one another by trenches that extend primarily along the first direction. Steps are formed along bottoms of the trenches. Gatelines are formed on the steps and along lower regions of the walls. After the gatelines are formed, the walls are patterned into spaced-apart pillars that have bottom regions below the gatelines. In some embodiments the gated devices may be transistors or thyristors.
Public/Granted literature
- US20150364379A1 Methods of Forming Gated Devices Public/Granted day:2015-12-17
Information query
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