Invention Grant
- Patent Title: Integrated circuit barrierless microfluidic channel
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Application No.: US15067267Application Date: 2016-03-11
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Publication No.: US09385062B1Publication Date: 2016-07-05
- Inventor: Lawrence A. Clevenger , Vincent J. McGahay , Joyeeta Nag , Yiheng Xu
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Michael J. DiCato; Steven Meyers
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40 ; H01L23/367

Abstract:
A structure and method for fabricating a continuous cooling channel in the back end of line wiring levels of an integrated circuit (IC) chip is provided. This continuous cooling channel may provide a path for a cooling source such as a fluid pumped from an external fluidic-cooling circulation driver to make physical contact locally with and cool the back end levels within the IC chip that may generate heat as a byproduct of the IC device's routine operations. Such a cooling structure is achieved by removing a horizontal portion of a barrier layer from an intermediate region of an interlevel interconnect structure, selective to a vertical portion of the barrier layer located on a sidewall of the interlevel interconnect structure, using gas cluster ion beam etching as well as removing the bulk conductor by additional means.
Public/Granted literature
- US20160181153A1 INTEGRATED CIRCUIT BARRIERLESS MICROFLUIDIC CHANNEL Public/Granted day:2016-06-23
Information query
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