Invention Grant
- Patent Title: Bonding apparatus
- Patent Title (中): 接合装置
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Application No.: US14561572Application Date: 2014-12-05
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Publication No.: US09385104B2Publication Date: 2016-07-05
- Inventor: Daisuke Tani , Koichi Takahashi
- Applicant: Shinkawa Ltd.
- Applicant Address: JP Tokyo
- Assignee: SHINKAWA LTD.
- Current Assignee: SHINKAWA LTD.
- Current Assignee Address: JP Tokyo
- Agency: Katten Muchin Rosenman LLP
- Priority: JP2012-131510 20120611; JP2013-061589 20130325
- Main IPC: G05G15/00
- IPC: G05G15/00 ; H01L23/00 ; H01L23/544 ; B32B37/00 ; B32B41/00 ; H01L23/48 ; H01L25/00

Abstract:
Provided is a flip-chip bonding apparatus (500) capable of stacking and bonding a second-layer of the semiconductor chip (30) onto a first-layer of the semiconductor chip (20) having first through-silicon vias, the second-layer of the semiconductor chip (30) having second through-silicon vias at positions corresponding to the first through-silicon vias. The flip-chip bonding apparatus (500) includes: a double-view camera (16) configured to take images of thechips (20) and (30); and a control unit (50) having a relative-position detection program (53) for detecting relative positions of the first-layer of the semiconductor chip (20) and the second-layer of the semiconductor chip (30) that are stacked and bonded based on an image of the first through-silicon vias on a surface of the first-layer of the semiconductor chip (20) taken by the double-view camera (16) before stacked bonding, and an image of the second through-silicon vias on a surface of the second-layer of the semiconductor chip (30) taken by the double-view camera (16) after stacked bonding. This provides accurate connection between through-silicon vias using a simple method.
Public/Granted literature
- US20150087083A1 BONDING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2015-03-26
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