Invention Grant
US09385188B2 Semiconductor device with termination region having floating electrodes in an insulating layer 有权
具有终端区域的半导体器件,在绝缘层中具有浮置电极

Semiconductor device with termination region having floating electrodes in an insulating layer
Abstract:
A semiconductor device which can suppress the influence of the external electric charge and can be efficiently manufactured is provided. The semiconductor device is provided with an active region in which a semiconductor element is disposed and a termination region between the active region and an edge surface of the semiconductor substrate. An insulating layer is disposed on at least a part of an upper surface of the termination region. A plurality of floating electrodes is disposed at an interval in the insulating layer in a direction from the active region toward the edge surface of the semiconductor substrate, and a width of the plurality of floating electrodes in a thickness direction of the semiconductor substrate is greater than a width of the plurality of floating electrodes in the direction from the active region toward the edge surface of the semiconductor substrate.
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