Invention Grant
- Patent Title: Integrated circuits and manufacturing methods thereof
- Patent Title (中): 集成电路及其制造方法
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Application No.: US13722142Application Date: 2012-12-20
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Publication No.: US09385213B2Publication Date: 2016-07-05
- Inventor: Chung-Cheng Wu , Ali Keshavarzi , Ka Hing Fung , Ta-Pen Guo , Jiann-Tyng Tzeng , Yen-Ming Chen , Shyue-Shyh Lin , Shyh-Wei Wang , Sheng-Jier Yang , Hsiang-Jen Tseng , David B. Scott , Min Cao
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW
- Agency: Hauptman Ham, LLP
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/66 ; H01L23/485 ; H01L27/02 ; H01L27/092 ; H01L29/78 ; H01L21/8238

Abstract:
A method of forming an integrated circuit including forming a first diffusion area and a second diffusion area on a substrate, wherein the first diffusion area is configured for a first type transistor, the second diffusion area is configured for a second type transistor. The method further includes forming first source and drain regions in the first diffusion area. The method further includes forming second source and drain regions in the second diffusion area. The method further includes forming a gate electrode extending across the first diffusion area and the second diffusion area. The method further includes forming a first metallic layer, a second metallic layer, and a third metallic layer. The first metallic layer is electrically coupled with the first source region. The second metallic layer is electrically coupled with the first and second drain regions. The third metallic layer is electrically coupled with the second source region.
Public/Granted literature
- US20130130456A1 INTEGRATED CIRCUITS AND MANUFACTURING METHODS THEREOF Public/Granted day:2013-05-23
Information query
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