Invention Grant
US09385298B2 Electromechanical conversion element, liquid drop discharge head and image forming apparatus 有权
机电转换元件,液滴排出头和成像设备

Electromechanical conversion element, liquid drop discharge head and image forming apparatus
Abstract:
An electromechanical conversion element includes a lower electrode formed directly or indirectly on a substrate or a base film; an electromechanical conversion film formed on the lower electrode and including a piezoelectric body having a perovskite crystal structure preferentially oriented with a {n00} plane where n is a positive integer; and an upper electrode formed on the electromechanical conversion film. A diffraction peak at a position 2θ at which a diffraction intensity has a maximum value and which corresponds to a (X00) plane or a (00X) plane, X being 1 or 2, obtained by θ-2θ measurement in X-ray diffraction measurement, shows a trapezoidal peak shape and has two or more bending points.
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