Invention Grant
- Patent Title: Phase change memory structure comprising phase change alloy center-filled with dielectric material
- Patent Title (中): 相变存储器结构,包括中间填充介电材料的相变合金
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Application No.: US13872087Application Date: 2013-04-27
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Publication No.: US09385310B2Publication Date: 2016-07-05
- Inventor: Jun-Fei Zheng
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Agency: Hultquist, PLLC
- Agent Steven J. Hultquist; Maggie Chappins
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A phase change memory structure, including a substrate having a cavity extending from a surface of the substrate into an interior region thereof, wherein the cavity is bounded by side wall surface, wherein the cavity is coated on the side wall surface with a film of phase change memory material defining a core that is at least partially filled with dielectric material such as alumina. Such phase change memory structure can be fabricated in a substrate containing a cavity closed at one end thereof with a bottom electrode, by a method including: conformally coating sidewall surface of the cavity and surface of the bottom electrode closing the cavity, with a phase change memory material film, to form an open core volume bounded by the phase change memory material film; at least partially filling the open core volume with alumina or other dielectric material; and forming a top electrode at an upper portion of the cavity.
Public/Granted literature
- US20130284999A1 PHASE CHANGE MEMORY STRUCTURE COMPRISING PHASE CHANGE ALLOY CENTER-FILLED WITH DIELECTRIC MATERIAL Public/Granted day:2013-10-31
Information query
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