Invention Grant
US09385310B2 Phase change memory structure comprising phase change alloy center-filled with dielectric material 有权
相变存储器结构,包括中间填充介电材料的相变合金

  • Patent Title: Phase change memory structure comprising phase change alloy center-filled with dielectric material
  • Patent Title (中): 相变存储器结构,包括中间填充介电材料的相变合金
  • Application No.: US13872087
    Application Date: 2013-04-27
  • Publication No.: US09385310B2
    Publication Date: 2016-07-05
  • Inventor: Jun-Fei Zheng
  • Applicant: Entegris, Inc.
  • Applicant Address: US MA Billerica
  • Assignee: ENTEGRIS, INC.
  • Current Assignee: ENTEGRIS, INC.
  • Current Assignee Address: US MA Billerica
  • Agency: Hultquist, PLLC
  • Agent Steven J. Hultquist; Maggie Chappins
  • Main IPC: H01L45/00
  • IPC: H01L45/00
Phase change memory structure comprising phase change alloy center-filled with dielectric material
Abstract:
A phase change memory structure, including a substrate having a cavity extending from a surface of the substrate into an interior region thereof, wherein the cavity is bounded by side wall surface, wherein the cavity is coated on the side wall surface with a film of phase change memory material defining a core that is at least partially filled with dielectric material such as alumina. Such phase change memory structure can be fabricated in a substrate containing a cavity closed at one end thereof with a bottom electrode, by a method including: conformally coating sidewall surface of the cavity and surface of the bottom electrode closing the cavity, with a phase change memory material film, to form an open core volume bounded by the phase change memory material film; at least partially filling the open core volume with alumina or other dielectric material; and forming a top electrode at an upper portion of the cavity.
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