Invention Grant
- Patent Title: Laser beam controlling device and extreme ultraviolet light generating apparatus
- Patent Title (中): 激光束控制装置和极紫外光发生装置
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Application No.: US14724636Application Date: 2015-05-28
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Publication No.: US09386675B2Publication Date: 2016-07-05
- Inventor: Toru Suzuki , Osamu Wakabayashi
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JP2012-279637 20121221
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G02B27/14 ; G02B27/00 ; H01S3/00 ; G02B17/08 ; H01S3/23 ; G02B27/10

Abstract:
A laser beam controlling device may include: a guide laser device; a guide laser beam wavefront adjuster provided in a beam path of the guide laser beam outputted from the guide laser device; a beam combiner configured to adjust travel directions of a laser beam outputted from a laser system and the guide laser beam outputted from the guide laser beam wavefront adjuster to coincide with each other, a both beam wavefront adjuster provided in a beam path of both the laser beam and the guide laser beam outputted from the beam combiner, a beam monitor provided in a beam path of both the laser beam and the guide laser beam outputted from the both beam wavefront adjuster, and a controller configured to control the guide laser beam wavefront adjuster and the both beam wavefront adjuster based on detection results at the beam monitor with respect to both the laser beam and the guide laser beam.
Public/Granted literature
- US20150264792A1 LASER BEAM CONTROLLING DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS Public/Granted day:2015-09-17
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