Invention Grant
- Patent Title: Method of wet cleaning aluminum chamber parts
- Patent Title (中): 铝制室内湿法清洗方法
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Application No.: US14041385Application Date: 2013-09-30
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Publication No.: US09387521B2Publication Date: 2016-07-12
- Inventor: Hong Shih , Fan-Cheung Sze , Brian McMillin , John Daugherty , Yan Fang , Duane Outka , Tuochuan Huang , Sivakami Ramanathan
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Beyer Law Group LLP
- Main IPC: B08B7/04
- IPC: B08B7/04 ; B08B7/02 ; B24C1/00 ; B08B7/00 ; H01L21/67

Abstract:
A method of wet cleaning an aluminum part having bare aluminum surfaces and anodized aluminum surfaces. The method includes CO2 dry ice blasting the surfaces of the aluminum part at approximately 35 to approximately 45 psi, masking the aluminum part to conceal the bare aluminum surfaces, soaking the dry ice blasted and masked aluminum part in deionized water at or above approximately 60° C., scrubbing the aluminum part with an abrasive pad and deionized water after completion of the soaking in deionized water, and repeating the soaking and scrubbing in the recited order at least three additional times.
Public/Granted literature
- US20140150819A1 METHOD OF WET CLEANING ALUMINUM CHAMBER PARTS Public/Granted day:2014-06-05
Information query
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