Invention Grant
- Patent Title: Substrate storing container
- Patent Title (中): 基材储存容器
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Application No.: US14131120Application Date: 2012-07-03
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Publication No.: US09387960B2Publication Date: 2016-07-12
- Inventor: Tsuyoshi Nagashima , Shuichi Inoue , Takaharu Oyama , Chiaki Matsutori , Kazumasa Ohnuki , Hiroyuki Shida , Hiroki Yamagishi
- Applicant: Tsuyoshi Nagashima , Shuichi Inoue , Takaharu Oyama , Chiaki Matsutori , Kazumasa Ohnuki , Hiroyuki Shida , Hiroki Yamagishi
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Miraial Co., Ltd.,Shin-Etsu Polymer Co., Ltd.
- Current Assignee: Miraial Co., Ltd.,Shin-Etsu Polymer Co., Ltd.
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Osha Liang LLP
- Priority: JP2011-150284 20110706
- International Application: PCT/JP2012/066989 WO 20120703
- International Announcement: WO2013/005740 WO 20130110
- Main IPC: B65D43/02
- IPC: B65D43/02 ; H01L21/673

Abstract:
A substrate storing container includes: a container body for storing semiconductor wafers; a door that is fitted to the front of the container body; and a locking mechanism locking the door. The locking mechanism includes: a rotary driver that is supported by the door and operated from a cover plate side; and a locking bar that vertically slides as the rotary driver rotates to bring the distal end into, and out of, a locking hollow of the container body. The rotary driver is separated into first and second rotary drivers. The first and second rotary drivers are formed with first and second cam portions, respectively. The first and second cam portions are made to support the proximal end of the locking bar therebetween so that the locking bar can sway in the thickness direction of the door.
Public/Granted literature
- US20140138279A1 SUBSTRATE STORING CONTAINER Public/Granted day:2014-05-22
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