Invention Grant
US09389077B2 Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device
有权
加速度和角速度共振检测一体化结构,以及相关的MEMS传感器装置
- Patent Title: Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device
- Patent Title (中): 加速度和角速度共振检测一体化结构,以及相关的MEMS传感器装置
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Application No.: US14032052Application Date: 2013-09-19
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Publication No.: US09389077B2Publication Date: 2016-07-12
- Inventor: Claudia Comi , Alberto Corigliano , Leonardo Baldasarre
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group PLLC
- Priority: ITTO2012A0855 20120928
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01P15/097 ; G01P15/125 ; G01C19/574 ; G01P15/08

Abstract:
An integrated detection structure has a first inertial mass and a second inertial mass, each of which is elastically anchored to a substrate and has a linear movement along a first horizontal axis, a first detection movement of rotation about a first axis of rotation parallel to a second horizontal axis and a second detection movement of translation along the second horizontal axis; driving electrodes cause linear movement of the inertial masses, in opposite directions of the first horizontal axis; a pair of flexural resonator elements and a pair of torsional resonator elements are elastically coupled to the inertial masses, the torsional resonator elements having a resonant movement of rotation about a second axis of rotation and a third axis of rotation, parallel to one another and to the first axis of rotation.
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