Invention Grant
US09389077B2 Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device 有权
加速度和角速度共振检测一体化结构,以及相关的MEMS传感器装置

Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device
Abstract:
An integrated detection structure has a first inertial mass and a second inertial mass, each of which is elastically anchored to a substrate and has a linear movement along a first horizontal axis, a first detection movement of rotation about a first axis of rotation parallel to a second horizontal axis and a second detection movement of translation along the second horizontal axis; driving electrodes cause linear movement of the inertial masses, in opposite directions of the first horizontal axis; a pair of flexural resonator elements and a pair of torsional resonator elements are elastically coupled to the inertial masses, the torsional resonator elements having a resonant movement of rotation about a second axis of rotation and a third axis of rotation, parallel to one another and to the first axis of rotation.
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