Invention Grant
US09391046B2 Semiconductor device and method of forming 3D semiconductor package with semiconductor die stacked over semiconductor wafer
有权
半导体器件和半导体晶片上形成半导体晶片的半导体封装形成半导体晶片的方法
- Patent Title: Semiconductor device and method of forming 3D semiconductor package with semiconductor die stacked over semiconductor wafer
- Patent Title (中): 半导体器件和半导体晶片上形成半导体晶片的半导体封装形成半导体晶片的方法
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Application No.: US13112172Application Date: 2011-05-20
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Publication No.: US09391046B2Publication Date: 2016-07-12
- Inventor: Yeonglm Park , HeeJo Chi , HyungMin Lee
- Applicant: Yeonglm Park , HeeJo Chi , HyungMin Lee
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/40 ; H01L25/065 ; H01L23/31 ; H01L23/36 ; H01L23/48 ; H01L23/552 ; H01L23/00 ; H01L25/00

Abstract:
A semiconductor device has a substrate and plurality of first semiconductor die having conductive vias formed through the first semiconductor die mounted with an active surface oriented toward the substrate. An interconnect structure, such as bumps or conductive pillars, is formed over the substrate between the first semiconductor die. A second semiconductor die is mounted to the first semiconductor die. The second semiconductor die is electrically connected through the interconnect structure to the substrate and through the conductive vias to the first semiconductor die. An underfill material is deposited between the first semiconductor die and substrate. Discrete electronic components can be mounted to the substrate. A heat spreader or shielding layer is mounted over the first and second semiconductor die and substrate. Alternatively, an encapsulant is formed over the die and substrate and conductive vias or bumps are formed in the encapsulant electrically connected to the first die.
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