Invention Grant
- Patent Title: FinFET device and method for manufacturing the same
- Patent Title (中): FinFET器件及其制造方法
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Application No.: US14397822Application Date: 2013-08-06
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Publication No.: US09391073B2Publication Date: 2016-07-12
- Inventor: Huaxiang Yin , Xiaolong Ma , Weijia Xu , Qiuxia Xu , Huilong Zhu
- Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Christensen Fonder P.A.
- Priority: CN201310275191 20130702
- International Application: PCT/CN2013/080887 WO 20130806
- International Announcement: WO2015/000204 WO 20150108
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/00 ; H01L29/00 ; H01L27/088 ; H01L29/66 ; H01L29/78 ; H01L21/306 ; H01L21/8234

Abstract:
A FinFET device and a method for manufacturing the same. The FinFET device includes a plurality of fins each extending in a first direction on a substrate; a plurality of gate stacks each being disposed astride the plurality of fins and extending in a second direction; a plurality of source/drain region pairs, respective source/drain regions of each source/drain region pair being disposed on opposite sides of the each gate stack in the second direction; and a plurality of channel regions each comprising a portion of a corresponding fin between the respective source/drain regions of a corresponding source/drain pair, wherein the each fin comprises a plurality of protruding cells on opposite side surfaces in the second direction.
Public/Granted literature
- US20150311200A1 FINFET DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2015-10-29
Information query
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