Invention Grant
US09391077B2 SiGe and Si FinFET structures and methods for making the same
有权
SiGe和Si FinFET结构及其制造方法
- Patent Title: SiGe and Si FinFET structures and methods for making the same
- Patent Title (中): SiGe和Si FinFET结构及其制造方法
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Application No.: US14176575Application Date: 2014-02-10
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Publication No.: US09391077B2Publication Date: 2016-07-12
- Inventor: Kangguo Cheng , Bruce B. Doris , Pouya Hashemi , Ali Khakifirooz , Alexander Reznicek
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent L. Jeffrey Kelly; Steven Meyers
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L27/092 ; H01L29/16 ; H01L29/161 ; H01L21/8238

Abstract:
FinFET structures and methods for making the same. A method includes: creating a plurality of Silicon fins on a first region of a substrate, creating a plurality of Silicon-Germanium fins on a second region of the substrate, adjusting a Silicon fin pitch of the plurality of Silicon fins to a predetermined value, and adjusting a Silicon-Germanium fin pitch of the plurality of Silicon-Germanium fins to a predetermined value, where the creating steps are performed in a manner that Silicon material and Silicon-Germanium material used in making the plurality of fins will be on the semiconductor structure at a same time.
Public/Granted literature
- US20150228653A1 SiGe and Si FinFET Structures and Methods for Making the Same Public/Granted day:2015-08-13
Information query
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