Invention Grant
- Patent Title: Oxide semiconductor
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Application No.: US14677131Application Date: 2015-04-02
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Publication No.: US09391146B2Publication Date: 2016-07-12
- Inventor: Shunpei Yamazaki , Masahiro Takahashi , Noboru Kimizuka
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office
- Agent Eric J. Robinson
- Priority: JP2013-056952 20130319
- Main IPC: H01L29/22
- IPC: H01L29/22 ; H01L29/04 ; H01L29/24 ; H01L29/786 ; H01L29/26 ; C01G15/00

Abstract:
To provide an oxide semiconductor with a novel structure. Such an oxide semiconductor is composed of an aggregation of a plurality of InGaZnO4 crystals each of which is larger than or equal to 1 nm and smaller than or equal to 3 nm, and in the oxide semiconductor, the plurality of InGaZnO4 crystals have no orientation. Alternatively, such an oxide semiconductor is such that a diffraction pattern like a halo pattern is observed by electron diffraction measurement performed by using an electron beam with a probe diameter larger than or equal to 300 nm, and that a diffraction pattern having a plurality of spots arranged circularly is observed by electron diffraction measurement performed by using an electron beam with a probe diameter larger than or equal to 1 nm and smaller than or equal to 30 nm.
Public/Granted literature
- US20150214309A1 OXIDE SEMICONDUCTOR Public/Granted day:2015-07-30
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