Invention Grant
- Patent Title: Semiconductor device and method for fabricating semiconductor device
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US13916890Application Date: 2013-06-13
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Publication No.: US09391188B2Publication Date: 2016-07-12
- Inventor: Meng Zhao
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Shanghai
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: Koppel, Patrick, Heybl & Philpott
- Priority: CN201110117441 20110509
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/06

Abstract:
Disclosed is a semiconductor device and a method for fabricating the semiconductor device. The method for fabricating the semiconductor device comprises steps of: forming a side cliff in a substrate in accordance with a gate mask pattern, the side cliff being substantially vertical to a substrate surface; forming a dielectric layer on the substrate that comprises the side cliff; etching the dielectric layer to have the dielectric layer left only on the side cliff, as a dielectric wall; and burying the side cliff by a substrate growth, the burying is performed up to a level higher than the upper end of the dielectric wall.
Public/Granted literature
- US20130341688A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE Public/Granted day:2013-12-26
Information query
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